Proceedings from the International Conference on Frontiers in Nanoscience and Nanotechnology (ICFNN’16); Edited by: S. SwaminathanNo Access

Reactive DC Magnetron Sputtered ZnO Thin Films for Piezoelectric Application

M. Abinaya

Functional Nanomaterials & Devices Lab, Centre for Nanotechnology & Advanced Biomaterials, SASTRA University, Thanjavur 613 401, India

School of Electrical & Electronics Engineering, SASTRA University, Thanjavur 613 401, India

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K. M. Dhanisha

Functional Nanomaterials & Devices Lab, Centre for Nanotechnology & Advanced Biomaterials, SASTRA University, Thanjavur 613 401, India

School of Electrical & Electronics Engineering, SASTRA University, Thanjavur 613 401, India

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M. Manoj Cristopher

Functional Nanomaterials & Devices Lab, Centre for Nanotechnology & Advanced Biomaterials, SASTRA University, Thanjavur 613 401, India

School of Electrical & Electronics Engineering, SASTRA University, Thanjavur 613 401, India

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P. Deepak Raj

Functional Nanomaterials & Devices Lab, Centre for Nanotechnology & Advanced Biomaterials, SASTRA University, Thanjavur 613 401, India

School of Electrical & Electronics Engineering, SASTRA University, Thanjavur 613 401, India

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K. Jeyadheepan

School of Electrical & Electronics Engineering, SASTRA University, Thanjavur 613 401, India

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, and

M. Sridharan

Functional Nanomaterials & Devices Lab, Centre for Nanotechnology & Advanced Biomaterials, SASTRA University, Thanjavur 613 401, India

School of Electrical & Electronics Engineering, SASTRA University, Thanjavur 613 401, India

E-mail Address: m.sridharan@ece.sastra.edu

Corresponding author.

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https://doi.org/10.1142/S0219581X1760047XCited by:1 (Source: Crossref)

Abstract

Zinc oxide (ZnO) films have been sputter coated over glass substrates at different cathode powers. Influence of cathode power on physical characteristics of ZnO samples was analyzed using X-ray diffractometer (XRD), field emission-scanning electron microscopy (FE-SEM), UV-Visible spectrophotometer and four-point probe (FPP) method. XRD patterns exhibited $c$ -axis-oriented ZnO and enhanced crystallinity with increase in cathode power due to the increase in adatom mobility. Uniformly arranged spherical grains were observed from FE-SEM images. The grain size increased from 25 to 40nm with increase in power. All samples exhibited high electrical resistance (G $Ω$ ) which is compatible for piezoelectric application.

Keywords:

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