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articleNo Access
Reactive DC Magnetron Sputtered ZnO Thin Films for Piezoelectric Application
International Journal of Nanoscience21 May 2018
Preview Abstract
Zinc oxide (ZnO) films have been sputter coated over glass substrates at different cathode powers. Influence of cathode power on physical characteristics of ZnO samples was analyzed using X-ray diffractometer (XRD), field emission-scanning electron microscopy (FE-SEM), UV-Visible spectrophotometer and four-point probe (FPP) method. XRD patterns exhibited $c$ -axis-oriented ZnO and enhanced crystallinity with increase in cathode power due to the increase in adatom mobility. Uniformly arranged spherical grains were observed from FE-SEM images. The grain size increased from 25 to 40nm with increase in power. All samples exhibited high electrical resistance (G $Ω$ ) which is compatible for piezoelectric application.