Micro-machined silicon accelerometer with piezoresistive SCR implementation for glucolysis
Abstract
Micro-Electro-Mechanical Systems (MEMS) noted as micro generation have grown to advance greater than in previous decades. This venture reports approximately the silicon-based piezoresistive (PZR) microcantilever for glucose sensing. Elevated sensitivity, highest operation collection, extensive frequency reaction, excessive resolution, proper linearity are the majority preferred residences of the sensor. The displacement strain at specific limits, sensitivity and deformation is analyzed by means of finite element method for two exclusive structures. 3D structural modeling of three layers in micromechanical sensors may be achieved at ANSYS 14.5. In bio-medical request, adsorption of glucose on a functionalized exterior of the micro-fabricated cantilever will gather an exterior strain and therefore meander the cantilever beam. The cantilever meandering enhances the sensitivity of the microcantilevers sensor. Instead of capacitive accelerometer which produces changes in the seismic mass, the best method is PZR accelerometer that takes advantage of change in resistance and produces electrical output signal. The argument of the resolution problem in the study of a system for PZR detection technique with requirement of devices like Low pressure chemical vapor deposition (LPCVD) etc. is easily done by introducing stress concentrated region (SCR) which is considered as slot in the structure so that it enhances sensitivity of the device further higher. This technique is used for a sample, to detect and monitor glucose level and it produces simulation wrapping up in the microcantilever beam such as twist, pressure, injure and displacement.
