CHAPTER 13: OPEN VOLUME MICROFLUIDIC PROBES

The following sections are included:

• Introduction

• Microfluidic probes

• Multifunctional pipette

• Direct probe fabrication

  • SU-8 as a device material

  • Multilayer processing of SU-8

  • Bonding strategies

  • Alignment considerations

  • The MF_π in SU-8

• Integration of sensing components into probes

• A microfluidic probe for microdialysis

  • Dialysis membrane technology

  • Design, modeling, and fabrication of a microdialysis probe

    • Device design

    • Fabrication

• Challenges for prototyping and upscaling

  • Planarization defects

  • Collapse of structures and resist de-bonding

  • Layout consideration

• Interfacing to external components

• Future outlook

• Acknowledgments

• References