World Scientific
Skip main navigation

Cookies Notification

We use cookies on this site to enhance your user experience. By continuing to browse the site, you consent to the use of our cookies. Learn More
×

System Upgrade on Tue, May 28th, 2024 at 2am (EDT)

Existing users will be able to log into the site and access content. However, E-commerce and registration of new users may not be available for up to 12 hours.
For online purchase, please visit us again. Contact us at customercare@wspc.com for any enquiries.

PULL-IN INSTABILITY OF CIRCULAR PLATE MEMS: A NEW MODEL BASED ON STRAIN GRADIENT ELASTICITY THEORY

    https://doi.org/10.1142/S1758825112001324Cited by:19 (Source: Crossref)

    Size-dependent characteristics have been widely observed in microscale devices. For the electrostatically actuated circular microplate-based MEMS, we propose a new model to predict the size-dependent pull-in instability based on the strain gradient elasticity theory. The model embeds three material length scale parameters (MLSPs), which can effectively predict the size-dependent pull-in voltage. The model can be reduced to the classical continuum model when MLSPs are ignored. The results show that the normalized pull-in voltage predicted by the present model increases nonlinearly with the decrease of the size scale of the plate, and the size effect becomes prominent if the characteristic dimension (plate thickness) is on the order of microns or smaller. The effects of the plate thickness and gap on the pull-in voltage are also investigated.

    Remember to check out the Most Cited Articles!

    Check out these titles in Mechanical Engineering!