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Nowadays tools based on Scanning Probe Methods (SPM) have become indispensable in a wide range of applications such as cell imaging and spectroscopy, profilometry, or surface patterning on a nanometric scale. Common to all SPM techniques is a typically slow working speed which is one of their main drawbacks. The SPM speed barrier can be improved by operating a number of probes in parallel mode. A key element when developing probe array devices is a convenient read-out system for measurements of the probe deflection. Such a read-out should be sufficiently sensitive, resistant to the working environment, and compatible with the operation of large number of probes working in parallel. In terms of fabrication, the geometrical uniformity i.e. the realisation of large numbers of identical probes, is a major concern but also the material choice compatible with high sensitivity, the detection scheme and the working environment is a challenging issue. Examples of promising applications using parallel SPM are dip-pen-nanolithography, data storage, and parallel imaging.