In this paper, the humidity sensing properties of multi-walled carbon nanotubes modified with LiClO4 was investigated. FTIR spectra showed that the ends of carbon nanotubes purified with nitric acid was opened and saturated with carboxylic acid groups and carboxylate groups. For comparison, the humidity sensing characteristics of four elements, MnWO4 (Hubnerite), BaTiO3 (Perovskite), NiWO4 (Huberite), ZnCr2O4 (Spinel) were discussed. Experimental data showed that LiClO4/MWNTs element exhibited excellent humidity sensing properties, that is, the response time can reach 7 min, the recovery time within 1 min and its sensitivity up to 35 000. Also, it was found that a small increase in resistance of pure MWNTs disappeared during the first few minutes after exposure to water by modifying with LiClO4. The static and dynamic measurements showed that WMNTs/LiClO4 sensing element exhibited high sensitivity and selectivity to water vapor.