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The composition of Mn0.05Si0.95 polycrystalline films on (001) Si substrate are prepared by vacuum deposition and post-crystallization processes. X-ray diffraction studies indicate that there are two phases coexist in the film: tetragonal, Mn4Si7 and diamond-like Si (Mn). The content of Si(Mn) phase increases with increasing the post-annealing temperature. Temperature dependence of the magnetization shows that there are two ferromagnetic phases with Curie temperature of around 50 K and near room temperature, which is confirmed by x-ray magnetic circular dichroism (XMCD).