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The effect of high-energy electron beam on the silicon carbide nanopowder’s structural parameters, strain and powder size was studied. The sample was irradiated with ∼2-MeV electron beam energy under different fluencies such as 1.13 ⋅ 1017, 1.89 ⋅ 1017, 2.79 ⋅ 1017 and 3.69 ⋅ 1017 cm−2 at the linear electronic accelerator. Initial and irradiated samples at various doses have been analyzed in the XRD. The nanostructural effects within FullProf are treated using the pseudo-Voigt profile function. The dependences of maximum strain and nanocrystallite size on irradiation dose were obtained and analyzed.