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The paper presents the verification of home made Position Sensitive Spectrometer (PSS) while using synchrotron radiation light (SRL) as an excitation source. When Cr in the substance of light base was analyzed by the PSS, the lowest detection limit of a few ppm was achieved. Also linear proportionality between the count rate of the PSS and Cr concentration was obtained. This verities the feasibility of trace element analysis with high-energy resolution when using the PSS. At measurement of Cr Kβ₅ band in metallic Cr and its compounds, it was discerned that the intensity of Cr Kβ₅ becomes more intense with increasing oxidation number of Cr compounds. Such a change shows that high-energy resolution analysis using the PSS can make a useful method for the study of chemical states.

We describe characteristics of high-resolution, wavelength-dispersive crystal spectrometers equipped with a different type of position sensitive X-ray detectors: PSPC, CCD, IP and MCP. Utilities of these position sensitive spectrometers in PIXE experiments are demonstrated by referring several recent topics of elemental analysis, chemical state analysis and a study on sample charging.