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In micro-cutting processes, process variables including cutting force, cutting temperature and drill-workpiece interfacing conditions (lubrication and interaction, etc.) significantly affect the tool wear in a dynamic interactive in-process manner. The resultant tool life and cutting performance directly affect the component surface roughness, material removal rate and form accuracy control, etc. In this paper, a multiscale multiphysics oriented approach to modeling and analysis is presented particularly on tooling performance in micro drilling processes. The process optimization is also taken account based on establishing the intrinsic relationship between process parameters and cutting performance. The modeling and analysis are evaluated and validated through well-designed machining trials, and further supported by metrology measurements and simulations. The paper is concluded with a further discussion on the potential and application of the approach for broad micro manufacturing purposes.