Narrow Results

Imprinted molds which are contaminated by organic substances such as UV-resins through many times of imprinting processes are successfully cleaned with irradiation of a vacuum ultraviolet (VUV, λ = 172 nm) light. Substrate temperature, radiation distance, and ambient oxygen concentration are also revealed as important factors to clean the molds.

The following sections are included:

• Introduction

• Overview of Photon-Impact Studies of Molecular Superexcited States

• Dissociation of Superexcited Molecular Hydrogen

• Dissociation of Superexcited States of Diatomic and Triatomic Molecules

• VUV-Optical Oscillator-Strength Distributions of Polyatomic Molecules

• Photoionization Quantum Yields

• Dissociation of Superexcited States of Polyatomic Molecules
  • Acetylene
  • Silane
  • Dimethyl Ether
  • Other Related Studies

• Superexcited States as Reaction Intermediates in Some Collision Processes

• Superexcited States in Reaction Kinetics

• Superexcited States in the Condensed Phase

• Summary

• Acknowledgments

• References