Atomic force microscopy and X-ray reflectivity methods are used to characterize a surface morphology which includes the information of rms roughness, roughness exponent, and the height–height correlation length. Two major reasons to interpret the discrepancy of rms roughness data measured by AFM and X-ray reflectivity are (1) the bandpass of power spectra density is different and (2) the X-ray reflectivity probes the high density buried layer.