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Performance of a micro WDX-PIXE system that consists of position sensitive x-ray spectrometer and the heavy ion microbeam line is described. The influence of the position resolution of the position sensitive proportional counter (PSPC) used in the spectrometer on system energy resolution is discussed based on the measured values for C and O K x-rays. The system has successfully been used for chemical state analysis of various compound materials and small area of the materials (< 3 × 10-3mm2) can be analyzed.
Japan constructed the first ‘compact’ X-ray free-electron laser (XFEL), and started user operation in 2012. This chapter describes the historical development of the compact XFEL concept, the underlying physical principles of XFEL, the details of the accelerator system, the details of the photon beam line, and the scientific applications, followed by a brief comment on the future trend of the XFEL facilities.