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Terahertz Quantum-Cascade Laser Based on the Resonant-Phonon Depopulation Scheme
https://doi.org/10.1142/9789813223288_0012Cited by:1 (Source: Crossref)
Abstract:
We have designed GaAs/Al0.15Ga0.85As multilayer heterostructure (MH) with diagonal transitions and optimized oscillator strength – 0.425. We investigate the dependence of the MH energy band profile on the electric field and thermal properties of terahertz quantum cascade lasers (THz QCL) under different operation conditions. Furthermore, we develop a technique for the fabrication of THz QCL with double metal waveguide via low-temperature In-Au wafer bonding followed by substrate removal. Inductively coupled plasma reactive ion etching in BCl3/Ar at 15:15 sccm has been used to obtain ridge structure of various widths with vertical sidewalls.
