Special Issues: Nanoscience & Nanotechnology; Scanning Probe MicroscopyNo Access

SCANNING PROBE MICROSCOPY BASED NANOSCALE PATTERNING AND FABRICATION

NUS Nanoscience and Nanotechnology Initiative and Department of Physics, National University of Singapore, 2 Science Drive 3, 117542, Singapore

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HONG JING CHUNG

NUS Nanoscience and Nanotechnology Initiative and Department of Physics, National University of Singapore, 2 Science Drive 3, 117542, Singapore

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, and

ANDREW THYE SHEN WEE

NUS Nanoscience and Nanotechnology Initiative and Department of Physics, National University of Singapore, 2 Science Drive 3, 117542, Singapore

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https://doi.org/10.1142/S0219607707000207Cited by:4 (Source: Crossref)

Abstract

Nanotechnology is vital to the fabrication of integrated circuits, memory devices, display units, biochips and biosensors. Scanning probe microscope (SPM) has emerged to be a unique tool for materials structuring and patterning with atomic and molecular resolution. SPM includes scanning tunneling microscopy (STM) and atomic force microscopy (AFM). In this chapter, we selectively discuss the atomic and molecular manipulation capabilities of STM nanolithography. As for AFM nanolithography, we focus on those nanopatterning techniques involving water and/or air when operated in ambient. The typical methods, mechanisms and applications of selected SPM nanolithographic techniques in nanoscale structuring and fabrication are reviewed.

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References

X. N. Xieet al., Mater. Sci. Eng. R 54, 1 (2006), DOI: 10.1016/j.mser.2006.10.001. Crossref, Google Scholar
G. Binniget al., Phys. Rev. Lett. 49, 57 (1982). Crossref, Google Scholar
G. Binnig, C. F. Quate and C. Gerber, Phys. Rev. Lett. 56, 930 (1986), DOI: 10.1103/PhysRevLett.56.930. Crossref, Google Scholar
S. Hashioka and H. Matsumura, Jpn. J. Appl. Phys. 39, 7063 (2000), DOI: 10.1143/JJAP.39.7063. Crossref, Google Scholar
K. R. V. Subramanianet al., Nanotechnology 15, 158 (2004), DOI: 10.1088/0957-4484/15/1/031. Crossref, Google Scholar
C. Enkrichet al., Adv. Mater. 17, 2547 (2005), DOI: 10.1002/adma.200500804. Crossref, Google Scholar
S. Y. Chou, P. R. Krauss and P. J. Renstrom, Science 272, 85 (1996), DOI: 10.1126/science.272.5258.85. Crossref, Google Scholar
R. Otero, F. Rosei and F. Besenbacher, Annu. Rev. Phys. Chem. 57, 497 (2006), DOI: 10.1146/annurev.physchem.57.032905.104634. Crossref, Google Scholar
R. D. Pineret al., Science 283, 661 (1999), DOI: 10.1126/science.283.5402.661. Crossref, Google Scholar
E. S. Snow and P. M. Campbell, Appl. Phys. Lett. 64, 1932 (1994), DOI: 10.1063/1.111746. Crossref, Google Scholar
X. N. Xieet al., Adv. Mater. 17, 1386 (2005), DOI: 10.1002/adma.200500204. Crossref, Google Scholar
L. Bartels, G. Meyer and K. H. Reider, Phys. Rev. Lett. 79, 697 (1997), DOI: 10.1103/PhysRevLett.79.697. Crossref, Google Scholar
S. W. Hla, K. F. Braun and K. H. Reider, Phys. Rev. B 67, 201402 (2003), DOI: 10.1103/PhysRevB.67.201402. Crossref, Google Scholar
L. Bartels, G. Meyer and K. H. Reider, Appl. Phys. Lett. 71, 213 (1997), DOI: 10.1063/1.119503. Crossref, Google Scholar
L. J. Whitmanet al., Science 251, 1206 (1991), DOI: 10.1126/science.251.4998.1206. Crossref, Google Scholar
J. Mendezet al., J. Vac. Sci. Technol. B 14, 1145 (1996), DOI: 10.1116/1.588417. Crossref, Google Scholar
T. C. Shenet al., Science 268, 1590 (1995), DOI: 10.1126/science.268.5217.1590. Crossref, Google Scholar
L. Soukiassianet al., Phys. Rev. B 68, 035303 (2003), DOI: 10.1103/PhysRevB.68.035303. Crossref, Google Scholar
R. Nouchiet al., Phys. Rev. Lett. 97, 196101 (2006), DOI: 10.1103/PhysRevLett.97.196101. Crossref, Google Scholar
D. S. Ginger, H. Zhang and C. A. Mirkin, Angew Chem. Int. Ed. 43, 30 (2004), DOI: 10.1002/anie.200300608. Crossref, Google Scholar
K. Salaita, Y. H. Wang and C. A. Mirkin, Nat. Nanotechnol. 2, 145 (2007), DOI: 10.1038/nnano.2007.39. Crossref, Google Scholar
P. Vettigeret al., IEEE T. Nanotechnol. 1, 39 (2002), DOI: 10.1109/TNANO.2002.1005425. Crossref, Google Scholar
U. Düriget al., Tribol. Lett. 9, 25 (2000). Crossref, Google Scholar
H. C. Day and D. R. Allee, Appl. Phys. Lett. 62, 2691 (1993), DOI: 10.1063/1.109259. Crossref, Google Scholar
X. N. Xieet al., J. Am. Chem. Soc. 126, 7665 (2004), DOI: 10.1021/ja049560e. Crossref, Google Scholar
F. S. S. Chienet al., Appl. Phys. Lett. 76, 360 (2000), DOI: 10.1063/1.125754. Crossref, Google Scholar
M. Ishii and K. Matsumoto, Jpn. J. Appl. Phys. 34, 1329 (1995), DOI: 10.1143/JJAP.34.1329. Crossref, Google Scholar
E. S. Snow and P. M. Campbell, Science 270, 1639 (1995), DOI: 10.1126/science.270.5242.1639. Crossref, Google Scholar
E. S. Snow, D. Park and P. M. Campbell, Appl. Phys. Lett. 69, 269 (1996), DOI: 10.1063/1.117946. Crossref, Google Scholar
D. Wanget al., Appl. Phys. Lett. 67, 1295 (1995), DOI: 10.1063/1.114402. Crossref, Google Scholar
H. Sugimura and N. Nakagiri, J. Am. Chem. Soc. 119, 9226 (1997), DOI: 10.1021/ja971027u. Crossref, Google Scholar
H. Lee, E. Bae and W. Lee, Thin Solid Films 393, 237 (2001), DOI: 10.1016/S0040-6090(01)01075-6. Crossref, Google Scholar
S. Onclin, B. J. Ravoo and D. N. Reinhoudt, Angew Chem. Int. Ed. 44, 6282 (2005), DOI: 10.1002/anie.200500633. Crossref, Google Scholar
A. E. Gordonet al., J. Vac. Sci. Technol. B 13, 2805 (1995), DOI: 10.1116/1.588270. Crossref, Google Scholar
T. Teuschleret al., Appl. Phys. Lett. 67, 3144 (1995), DOI: 10.1063/1.114861. Crossref, Google Scholar
P. A. Fontaine and E. Dubois, Appl. Phys. Lett. 70, 3272 (1997). Google Scholar
J. A. Dagataet al., J. Appl. Phys. 96, 2386 (2004), DOI: 10.1063/1.1771820. Crossref, Google Scholar
R. García, M. Calleja and H. Rohrer, J. Appl. Phys. 86, 1898 (1999), DOI: 10.1063/1.370985. Crossref, Google Scholar
J. A. Dagataet al., J. Appl. Phys. 96, 2393 (2004), DOI: 10.1063/1.1771821. Crossref, Google Scholar
X. N. Xieet al., Adv. Mater. 19, 2618 (2007), DOI: 10.1002/adma.200602837. Crossref, Google Scholar
S. F. Lyuksyutovet al., Nat. Mater. 2, 468 (2003), DOI: 10.1038/nmat926. Crossref, Google Scholar
H. J. Chunget al., Appl. Phys. Lett. 88, 023116 (2006), DOI: 10.1063/1.2162800. Crossref, Google Scholar
X. N. Xieet al., J. Am. Chem. Soc. 128, 2738 (2006), DOI: 10.1021/ja0577241. Crossref, Google Scholar
R. Crooket al., Nature 424, 751 (2003), DOI: 10.1038/nature01841. Crossref, Google Scholar
A. Piodaet al., Phys. Rev. Lett. 93, 216801 (2004), DOI: 10.1103/PhysRevLett.93.216801. Crossref, Google Scholar
R. C. Barrett and C. F. Quate, J. Appl. Phys. 70, 2725 (1991), DOI: 10.1063/1.349388. Crossref, Google Scholar
D. M. Schaadtet al., Appl. Phys. Lett. 74, 472 (1999), DOI: 10.1063/1.123039. Crossref, Google Scholar
P. Mesquida, H. F. Knapp and A. Stemmer, Surf. Interface Anal. 33, 159 (2002), DOI: 10.1002/sia.1181. Crossref, Google Scholar
P. Mesquida and A. Stemmer, Adv. Mater. 13, 1395 (2001). Crossref, Google Scholar
H. Kado and T. Tohda, Appl. Phys. Lett. 66, 2961 (1995), DOI: 10.1063/1.114243. Crossref, Google Scholar