Heteroepitaxy
The following sections are included:
Introduction
Characterization Techniques
Electrical Techniques
Capacitance-Voltage
Current-Voltage
Deep Level Transient Spectroscopy
Resistivity and Mobility
Chemical Analysis
Secondary Ion Mass Spectrometry
Auger Electron Spectroscopy and Related Techniques
Optical Characterization
Scanning Electron Microscopy
Photoluminescence and Cathodoluminescence
Structural Analysis
Transmission Electron Microscopy
Rutherford Backscattering
X-ray Diffraction
Properties of GaAs/Si Films
Surface Morphology
Crystalline Quality
Purity and Residual Defects
Radius of Curvature; Residual Stress
Optical Properties
Interdiffusion
Major Outstanding Issues
Semi-Insulating GaAs
Reduction of Dislocation Densities
Reduction of Wafer Warpage
Surface Morphology
Conclusions
References
