Narrow Results

The hysteresis behavior of charges was observed in Capacitance-Voltage (C-V) curve characteristics of fluorinated polyimide film in MPS (Cu-fluorinated polyimide film-Si) test structure. The degree of hysteresis was almost constant up to 150°C and then sharply increased beyond 150°C. Hysteresis behavior up to 150°C was due to a fixed amount of mobile charges at the interface between fluorinated polyimide film and Si and one beyond 150°C was due to abrupt increase of mobile charges and their enhanced movement in the bulk of fluorinated polyimide film due to structural transition of fluorinated polyimide film.