DEPOSITION OF SILICON CONTAINING FILMS AND FTIR DIAGNOSTICS

The following sections are included:

• Introduction

• Precursors

• Species Detected in Organosilicon Plasmas

  • Optical Emission Spectroscopy (OES)

  • Mass Spectroscopy

  • Infrared Absorbtion Spectroscopy of the Plasma

    • Principles of FTIR Diagnostic of the Plasma Phase

    • The Absorption Spectra

    • Quantitative Analysis (Absorption Spectrometry)

    • Infrared Diagnostics of Organosilicon Plasma

• Open Questions and Conclusions

  • Species in the Gas Phase

  • Interface Plasma-Surface; Growing Mechanism

• References